Rotary Table RT is a high-speed and high precision rotary positioning table without backlash or lost motion, using a DD servo actuator replacing the existing combination mechanism of reduction gears and an actuator. Rotary Table RT consists a of DD motor, high resolution optical encoder and roller bearings supporting them. Roller bearings can receive load from every direction and have achieved compactization and smooth rotation by using
Crossed Roller Bearings proven in the industrial robot field.
In addition, the product can be used as a highly accurate positioning mechanism for semiconductor manufacturing devices and image processing testing and inspection equipment by combining an XY-θ table with a Precision Positioning Table.