Nano Linear NT is a direct drive moving magnet type 2-axes positioning table, which has magnets and an optical linear scale incorporated in a moving table made of steel, and stator coils and linear scale head incorporated in a steel bed.
Linear Way L as a linear motion rolling guide, high resolution linear scale, and the strongest neodymium magnet realizes a high precision positioning accuracy and high speed and quick response operation in compact sectional dimension.
Furthermore, mechanical contact is completely eliminated except linear motion rolling guides by adopting a unique design of a wireless moving table in which the linear scale sensor is arranged on the bed.
So this table generates very little dust and provides a high level of cleanliness.
Nano Linear NT is most suitable for use as a compact positioning mechanism for semiconductor and liquid crystal related equipment, and assembling systems, where cleanliness is essential.